Supply chain / Equipment
Tokyo Electron
Tokyo Electron makes coater/developers, etch, deposition and cleaning systems, including coater/developers supporting EUV and High-NA processes.
- Type
- Company
- Where it sits
- Works alongside lithography machines in the fab line.
What we checked
- Tokyo Electron lists coater/developer, plasma etch, deposition and wafer cleaning systems, with coater/developers supporting EUV including High-NA. (source)
Written by ComputeFinder from public pages on 2 October 2026. Company statements are the company's own, not independently checked, and reported items are marked as such. Not yet reviewed line by line by a second person. If something is wrong, tell us.